The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 23, 2003

Filed:

Sep. 28, 1999
Applicant:
Inventors:

Masato Yoshikawa, Kodaira, JP;

Shingo Ohno, Kodaira, JP;

Sho Kumagai, Kodaira, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 1/406 ; C23C 1/434 ; C23C 1/630 ; C23C 1/624 ;
U.S. Cl.
CPC ...
C23C 1/406 ; C23C 1/434 ; C23C 1/630 ; C23C 1/624 ;
Abstract

A method for making a dry plating built-up film comprises providing silicon carbide as a starting source and subjecting to dry plating while changing a concentration of a reactive gas continuously or intermittently to deposit and form, on a substrate, a thin film having different refractive indices along its thickness. A method for making a sputter built-up film is also described, which comprising providing silicon carbide as a target and subjecting to sputtering while changing making electric power against the target continuously or intermittently to deposit and form a thin film having different refractive indices along its thickness.


Find Patent Forward Citations

Yoshikawa, Masato. (2003). Method for controlling a refractive index of a dry plating film and method for making a dry plating built-up film (U.S. Patent No. 6666958). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6666958

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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