The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2003
Filed:
Nov. 13, 2001
Applicant:
Inventors:
Takao Marui, Sale, GB;
Ranjan Krishnachandra Badheka, Worsley, GB;
Frank Henry Read, Maclesfield Forrest, GB;
Assignee:
Shimadzu Research Laboratory (Europe) Ltd., Manchester, GB;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/20 ;
U.S. Cl.
CPC ...
H01J 3/20 ;
Abstract
A magnetic immersion lens has inner and outer pole-pieces arranged symmetrically about a longitudinal axis X-X of the lens, the inner pole piece having a through-bore and the lens producing a magnetic imaging field for directing along the through-bore secondary electrons emitted from a specimen positioned in front of the inner pole-piece. The lens has an axially-symmetric detection arrangement located within the through-bore. The detector comprises a focusser electrode, a repeller electrode, an extractor electrode, a detector electrode, and a reflector electrode