The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2003
Filed:
Nov. 13, 2001
Applicant:
Inventors:
Roger Palmans, Riemst, BE;
Yuri Lantasov, Minsk, BY;
Assignee:
Interuniversitair Microelektronica Centrum, Leuven, BE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 1/18 ; B05D 5/12 ; B05D 3/10 ;
U.S. Cl.
CPC ...
B05D 1/18 ; B05D 5/12 ; B05D 3/10 ;
Abstract
The present invention describes a method for copper deposition on a substrate having a barrier layer wherein a substrate ( ) and an activator ( ) are immersed in a copper plating bath in order to contact each other for a predetermined period.