The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2003
Filed:
May. 03, 2002
Applicant:
Inventor:
Hiroyuki Takashino, Tokyo, JP;
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/710 ; H01L 2/9792 ;
U.S. Cl.
CPC ...
H01L 2/710 ; H01L 2/9792 ;
Abstract
A plurality of ONO films are provided in a matrix on a substrate surface. Gate electrodes are provided on each of the ONO films. Further provided in the substrate surface are n-type impurity layers and p-type impurity layers. Each of the p-type impurity layers is arranged between the n-type impurity layers. In a plan view of the substrate surface, the n-type impurity layers and the p-type impurity layers are arranged to surround the respective ONO films and the gate electrodes.