The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2003
Filed:
Feb. 21, 2001
Bernardo D. Aumond, Sao Paulo, BR;
Kamal Youcef-Toumi, Cambridge, MA (US);
Massachusetts Institute of Technology, Cambridge, MA (US);
Abstract
An apparatus and method are provided for processing the images obtained from an atomic force microscopy when profiling high aspect ratio features. A deconvolution technique for deconvolving the sample image includes the use of multiple images but does not require exact calibration of the scanning probe. In one embodiment, erosion and dilation techniques are used to obtain an undistorted image of the sample being measured. In another embodiment, Legendre transforms are used to obtain an undistorted image of the sample being measured. Also described is a technique for measuring the tip radius of the scanning probe.