The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2003
Filed:
May. 24, 2001
Maki Hamaguchi, Kobe, JP;
Takahiro Kobayashi, Kobe, JP;
Abstract
Disclosed herein is an inner tube for CVD apparatus which is made of glass-like carbon. This inner tube has good heat resistance and good corrosion resistance. It also has an inside surface for good adhesion with CVD film constituents. Therefore, it hardly contaminates silicon wafers during the production of semiconductors. The inner tube is characterized by a specific coefficient of thermal expansion, a specific surface roughness of its inside surface, a specific oxygen/carbon atomic ratio (O/C) of its inside surface, and a specific I(D)/I(G) ratio of its inside surface, where I(D) is a peak intensity representing the C—C bond of diamond-like structure and I(G) is a peak intensity representing the C—C bond of graphite-like structure.