The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2003
Filed:
May. 16, 2002
Tae-Ho Kim, Seoul, KR;
Dong-Seok Ham, Suwon-si, KR;
Samsung Electronics Co., Ltd., Kyungki-do, KR;
Abstract
An air-sampling carrier for sampling air from a clean room of a semiconductor processing facility, an apparatus and a method for analyzing the air, wherein the air-sampling carrier includes a container having an inner space, a door mounted at a front wall of the container, a discharging pipe for discharging the air sample out of the container, and at least one inlet tube for introducing purge gas into the inner space of the container from outside the container. The discharging pipe and inlet tube are respectively formed on an outer surface of the container and connected to an inner space of the container. The air in the unit process tools is effectively sampled using an unmanned carrying apparatus and the pollution level of the air sample is simply and easily measured.