The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2003
Filed:
Apr. 18, 2002
Yih Chang, Chung-Ho, TW;
Jung-Lung Liu, Hsin Chu Industrial Park, TW;
Chih-Jen Yang, Hsin Chu Industrial Park, TW;
Chih-Ming Kuo, Hsin Chu Industrial Park, TW;
Jih-Yi Wang, Hsin Chu Industrial Park, TW;
Tien-Rong Lu, Tainan, TW;
RiTdisplay Corporation, , TW;
Abstract
A method and an apparatus for transporting substrates in all organic light emitting diode (OLED) process is disclosed, which has a transferring chamber provided for transporting substrates between processing modules and the atmosphere condition therein is able to be adjusted to be the same as the processing module by an atmosphere conditioner unit. According to the present invention, the substrates are not contaminated by moisture and the process operation and the factory layout are more flexible. Moreover, the OLED yield is improved.