The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2003
Filed:
Jun. 12, 2001
Applicant:
Inventor:
Choshoku Sai, Kanagawa, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K 5/00 ; F16C 3/206 ;
U.S. Cl.
CPC ...
G21K 5/00 ; F16C 3/206 ;
Abstract
A weight compensation apparatus for compensating for a weight of a stage that is movable along a vertical reference plane including a pulley having a pulley shaft, a belt which is wound around and supported by the pulley, and has the stage at one end and a counter mass corresponding to the stage at the other end, and a hydrostatic bearing which has an arcuated bearing portion, and supports the pulley shaft by causing a fluid to flow into a bearing gap between the bearing portion and the pulley shaft.