The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2003
Filed:
Apr. 26, 2000
Yoshinori Harada, Kashihara, JP;
Sharp Kabushiki Kaisha, Osaka, JP;
Abstract
A sheet resistance meter includes a sensor head for generating a magnetic field; and an amplifier for, when a semiconductor wafer, an object to be measured, is placed at a predetermined distance from the sensor head, detecting a variation in the magnetic field generated by the sensor head as the sheet resistance of a thin film formed on the semiconductor substrate, wherein the sensor head is disposed opposing only one of two sides of the semiconductor wafer. In this manner, a sheet resistance meter is offered that can be readily accommodated into an existent manufacturing line so as to enable in-line measurement of the sheet resistance of a thin film and suitable control of the properties of a thin film.