The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2003
Filed:
May. 18, 2000
Applicant:
Inventors:
Koichiro Nakanishi, Yokohama, JP;
Takahiro Numai, Kanagawa-ken, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/100 ; H01L 3/300 ; H01S 5/00 ;
U.S. Cl.
CPC ...
H01L 2/100 ; H01L 3/300 ; H01S 5/00 ;
Abstract
A method of producing a semiconductor element is disclosed which comprises a step of preparing a semiconductor element member comprising a projection region on a substrate, a step of embedding an upper surface of the substrate, and upper and side surfaces of the projection region in a potting material, an exposure step of exposing the upper surface of the projection region, a deposition step of depositing an electrode material on the upper surface of the projection region, and a step of removing the potting material.