The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2003
Filed:
Sep. 30, 2002
Applicant:
Inventors:
Yukihiro Takahashi, Tokyo, JP;
Kenichi Shinde, Tokyo, JP;
Assignee:
Hoya Corporation, Shinjyu-ku, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 1/00 ; G01N 2/100 ; C23C 1/600 ;
U.S. Cl.
CPC ...
B05D 1/00 ; G01N 2/100 ; C23C 1/600 ;
Abstract
To provide a thin film forming method and apparatus that can automatically form thin films having constant optical properties with high reproducibility Antireflection films are deposited on lenses that are held by a coating dome by vaporizing an evaporation material by using an electron gun The power to be applied to the electron gun is controlled so that a transmission or reflection light quantity value that is measured at each time point by an optical film thickness meter becomes equal or approximately equal to a standard light quantity value stored in a standard light quantity value data storing means