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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6656368 B1

PDFFull Text
Date of Patent:
Dec. 02, 2003

Filed:

Mar. 02, 2000

Nonstick layer for a micromechanical component

Applicant:
Inventors:

Martin Schoefthaler, Reutlingen, DE;

Peter Hein, Reutlingen, DE;

Helmut Skapa, Reutlingen, DE;

Horst Muenzel, Reutlingen, DE;

Assignee:

Robert Bosch GmbH, Stuttgart, DE;

Attorney:

Kenyon & Kenyon

Primary Examiner:

Robert Kunemund

Assistant Examiner:

Shamim Ahmed

Int. Cl.
CPC ...
H01L 2/100 ; C23F 1/00 ;
U.S. Cl.
CPC ...
H01L 2/100 ; C23F 1/00 ;
Abstract

A method for manufacturing micromechanical components, and a micromechanical component, in which a movable element is produced on a sacrificial layer. In a subsequent step the sacrificial layer beneath the movable element is removed so that the movable element becomes movable. After removal of the sacrificial layer, a protective layer is deposited on a surface of the movable element. Silicon oxide and/or silicon nitride is used for the protective layer.

Find Patent Forward Citations

Schoefthaler, Martin. (2003). Nonstick layer for a micromechanical component (U.S. Patent No. 6656368). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6656368

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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