The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2003
Filed:
Jul. 10, 2001
Takashi Terauchi, Tokyo, JP;
Yoshinori Tanaka, Tokyo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A contact plug formed between adjacent two wirings according to a self-aligning manner is provided. An interlayer oxide film is provided on a substrate layer conductive to the bottom face of the contact plug. A lower insulating film formed of a nitride based insulating film is provided so as to cover the entire surface of the interlayer oxide film except for the contact hole portion. A wiring , an upper insulating film formed of a nitride based insulating film, and sidewalls formed of a nitride based insulating film are provided over the lower insulating film The contact hole has a diameter larger than the interval defined between the wirings in the same layer as the interlayer oxide film