The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2003
Filed:
Nov. 28, 2001
Applicant:
Inventor:
Shinji Yamaguchi, Nagoya, JP;
Assignee:
NGK Insulators, Ltd., Nagoya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/68 ; C23C 1/600 ;
U.S. Cl.
CPC ...
H05B 3/68 ; C23C 1/600 ;
Abstract
A heater includes a substrate having a placing surface for placing an object to be heated thereon, a layer of a main heating element for heating the substrate and the object to be heated, a layer of an auxiliary heating element, and an insulating body interposed between the main heating element layer and the auxiliary heating element layer. An area of the auxiliary heating element layer is smaller than that of the main heating element layer, and while the substrate and the object to be heated are heated with heat generated from the main heating element layer, heat escaping from the substrate is supplemented with heat generated from the auxiliary heating element layer.