The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2003
Filed:
Oct. 30, 2002
Applicant:
Inventors:
Attila Balazs, Clackamas, OR (US);
Bruce Whitefield, Camas, WA (US);
Hiroshi Mizuno, Gresham, OR (US);
Russell Whaley, Gresham, OR (US);
Paul Szasz, Gresham, OR (US);
Steven Reder, Boring, OR (US);
Assignee:
LSI Logic Corporation, Milpitas, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 1/900 ;
U.S. Cl.
CPC ...
G06F 1/900 ;
Abstract
An integrated process tool monitoring system for semiconductor fabrication. Specifically, a process tool parameter auditing system, where a process tool user need not run a different verification system for each process tool type used and need not download parameters every time before a semiconductor device or material is to be processed by the process tool.
Balazs, Attila. (2003). Integrated process tool monitoring system for semiconductor fabrication (U.S. Patent No. 6650958). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6650958
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile