The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2003
Filed:
Jun. 07, 2002
Applicant:
Inventors:
Tilman Schäffer, Santa Barbara, CA (US);
Paul K. Hansma, Isla Vista, CA (US);
Assignee:
The Regents of the University of California, Oakland, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 5/16 ;
U.S. Cl.
CPC ...
H01J 5/16 ;
Abstract
A high sensitivity beam deflection sensing optical device, such as an atomic force microscope, including one or more of the following: specified means in the path of the incident beam for adjusting the size and/or power of the incident beam spot, means for moving the incident beam spot with movement of the object whereby to maintain the position of the spot on the object, and means for increasing the signal to noise ratio of the optical detector in which adjusted gains are applied to different segments of the optical detector.