The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2003
Filed:
Oct. 30, 2001
Applicant:
Inventors:
Won-Jin Kim, Kyunggi-do, KR;
Jin-Gi Hong, Kyunggi-do, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/13205 ;
U.S. Cl.
CPC ...
H01L 2/13205 ;
Abstract
Methods are provided for forming integrated circuit devices. A spin on glass (SOG) insulating layer is formed on an integrated circuit substrate. The SOG insulating layer includes sidewalls that define contact holes therein and spacers are formed on the sidewalls of the SOG insulating layer. Integrated circuit devices are also provided. The integrated circuit devices include an integrated circuit substrate, a spin on glass (SOG) insulating layer on the integrated circuit substrate. The SOG insulating layer includes sidewalls that define contact holes therein and spacers are provided on sidewalls of the SOG insulating layer.