The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 18, 2003

Filed:

Dec. 27, 2002
Applicant:
Inventors:

Yoshihiro Izumi, Kashihara, JP;

Osamu Teranuma, Tenri, JP;

Toshinori Yoshimuta, Takatsuki, JP;

Shinya Hirasawa, Uji, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/166 ; H01L 2/100 ; H01L 2/144 ;
U.S. Cl.
CPC ...
H01L 2/166 ; H01L 2/100 ; H01L 2/144 ;
Abstract

A TFT array is formed on a glass substrate (step P ). A surface protection layer is formed on the glass substrate so as to cover the TFT array (step P ). The glass substrate is divided to form active matrix, substrates with the surface protection layer being provided (step P ). The divided active matrix substrate is chamfered along its edges (step P ). The surface protection layer is removed from the active matrix substrate (step P ). An X-ray conductive layer is formed on the TFT array where the surface protection layer has been removed (step P ). By these steps, pollutants produced during the division and chamfering of the glass substrate are prevented from polluting the TFT array and the X-ray conductive layer, and the active element array and the semiconductor layer is prevented from deteriorating in terms of performance in manufacturing process for a two-dimensional image detector.


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