The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2003
Filed:
Oct. 19, 2001
Applicant:
Inventors:
Assignee:
Alcatel, Paris, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/1306 ; C23C 1/600 ;
U.S. Cl.
CPC ...
H01L 2/1306 ; C23C 1/600 ;
Abstract
In the invention, the atmosphere in a vacuum chamber ( ) is conditioned using a primary pump ( ), a secondary pump ( ), speed control means ( ) for controlling the speed of the primary pump, and at least first gas treatment means ( ) adapted for treating the extracted gases downstream from the primary pump ( ). The vacuum chamber ( ) is contained in a room ( ) having a false floor ( ) covering a space ( ). The primary pump ( ) and the gas treatment means ( ) are housed in the available space ( ) under the false floor ( ), so that the secondary pump ( ) can be placed in the immediate vicinity of the vacuum chamber ( ), and the primary pump ( ) is in the proximity of the vacuum chamber ( ).