The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 18, 2003

Filed:

May. 30, 2002
Applicant:
Inventors:

Akio Sato, Soka, JP;

Akira Chiyoda, Soka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 1/44 ;
U.S. Cl.
CPC ...
G01F 1/44 ;
Abstract

An air is fed from an air supply source to a detecting nozzle via a first fixed throttle section. The air is jetted from the detecting nozzle to the workpiece W to obtain a nozzle back pressure for detecting a position of a workpiece W. A first diffuser section is disposed downstream of the first fixed throttle section.


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