The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2003
Filed:
May. 06, 2002
Applicant:
Inventors:
Daniel S. Nelson, Chaska, MN (US);
David J. Hillman, Prescott, WI (US);
John McIntire, Chanhassen, MN (US);
Assignee:
Rosemount Inc., Eden Prairie, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/12 ;
U.S. Cl.
CPC ...
G01L 9/12 ;
Abstract
A barometric pressure sensor including a base layer, a sensor layer and a reference layer. The base layer has a passageway between a pressure inlet and a mounting face. The sensor layer is bonded by an insulating bond to the mounting face and includes a conductive diaphragm. The reference layer is mounted on the sensor layer to form a reference vacuum cavity. The reference layer includes a conducting surface facing the conductive diaphragm across the reference vacuum cavity to form a pressure sensing capacitor.