The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2003
Filed:
Nov. 18, 1999
Applicant:
Inventor:
Miles E. Goff, Carlisle, MA (US);
Assignee:
Raytheon Company, Lexington, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 1/900 ; H01L 2/3544 ;
U.S. Cl.
CPC ...
G06F 1/900 ; H01L 2/3544 ;
Abstract
Systems and methods are presented for employing arrays of coupling strips to measure misalignment of layers of multilayer devices as a function of directional coupling between pairs of strips. Each array is capable of detecting misalignment only in the direction perpendicular to the axes of the coupling strips, although multiple arrays may be employed for measuring misalignment in more than one direction. Such arrays are easily manufactured onto existing multilayer devices, and may be excised from such devices after misalignment has been measured.