The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2003
Filed:
Jan. 31, 2001
Nikon Corporation, , JP;
Abstract
A support assembly ( ) for an exposure apparatus ( ) is provided herein. The support assembly ( ) supports the components of the exposure apparatus ( ) above a mounting base ( ). The exposure apparatus ( ) includes noisy components ( ) and quiet components ( ). The support assembly ( ) includes an outer frame ( ) and an inner frame ( ). As provided herein, the outer frame ( ) supports some of the components of the exposure apparatus ( ) and the inner frame ( ) supports some of the components of the exposure apparatus ( ). Preferably, the outer frame ( ) is used to support the quiet components ( ) while the inner frame ( ) is used to support the noisy components ( ). Uniquely, a portion of the inner frame ( ) is positioned within a portion of the outer frame ( ). As a result of this design, both frames ( ) ( ) can effectively be mounted at the same mounting locations of the mounting base ( ). Further, the overall space taken up by the frames ( ) ( ) is minimized.
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