The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2003
Filed:
Apr. 02, 2002
Applicant:
Inventors:
Nobuhide Yamada, Tokyo, JP;
Rempei Nakata, Iwase Kamakura, JP;
Makoto Sugiura, Tsuchiura, JP;
Mutsuhiko Yoshioka, Tsukuba, JP;
Takahiro Kitano, Koshi-machi, JP;
Shinji Kobayashi, Kashi-machi, JP;
Assignee:
Other;
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/131 ; H01L 2/1469 ; B05D 3/12 ;
U.S. Cl.
CPC ...
H01L 2/131 ; H01L 2/1469 ; B05D 3/12 ;
Abstract
A coating solution for used in a scan coating method contains a low vapor pressure solvent having a vapor pressure lower than 1 Torr (133.322 Pa) at room temperature.