The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 04, 2003

Filed:

Jul. 14, 1999
Applicant:
Inventors:

Allen G. Jackson, Kettering, OH (US);

Mark D. Benedict, Worthington, OH (US);

Steven R. LeClair, Springboro, OH (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 1/518 ;
U.S. Cl.
CPC ...
G06F 1/518 ;
Abstract

A cellular automata neural network method for process modeling of film-substrate interactions utilizes a cellular automaton system having variable rules for each cell. The variable rules describe a state change algorithm for atoms or other objects near a substrate. The state change algorithm is used to create a training set of solutions for training a neural network. The cellular automaton system is run to model the film-substrate interactions with the neural network providing the state change solutions in place of the more computationally complex state change algorithm to achieve real-time or near real-time simulations.


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