The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2003
Filed:
Dec. 28, 2001
Applicant:
Inventors:
Ki-sang Kang, Suwon, KR;
Sung-mo Kang, Suwon, KR;
Assignee:
Samsung Electronics Co., Ltd., Kyungki-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 3/102 ;
U.S. Cl.
CPC ...
G01R 3/102 ;
Abstract
A semiconductor integrated circuit wafer tester includes a supporting plate on which a semiconductor wafer may be positioned and a tester head having a circular top plate installed a predetermined distance away from the supporting plate, wherein a probe card in the tester head that includes a circular printed circuit board having a diameter of at least 400 mm (15.75 inches) that is connected to the top plate and having a plurality of probe units formed on the printed circuit board allows electrical parameters of multiple chips formed on the semiconductor wafer to be measured simultaneously.