The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2003
Filed:
Sep. 24, 2002
Applicant:
Inventors:
Shunji Kubo, Tokyo, JP;
Atsushi Amoo, Tokyo, JP;
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/1336 ; H01L 2/18234 ;
U.S. Cl.
CPC ...
H01L 2/1336 ; H01L 2/18234 ;
Abstract
According to the present invention, a method for manufacturing a semiconductor device forms a cobalt silicide film on source/drain regions and and a gate electrode of transistors in the logic circuit region, making it possible to form a high-performance and highly integrated logic circuit.
Kubo, Shunji. (2003). Method for manufacturing a semiconductor device (U.S. Patent No. 6642093). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6642093
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile