The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2003
Filed:
Sep. 21, 2000
Applicant:
Inventor:
John MacNeil, Cardiff, GB;
Assignee:
Trikon Holdings Limited, Gwent, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65B 3/04 ;
U.S. Cl.
CPC ...
B65B 3/04 ;
Abstract
This invention relates to methods and apparatus for delivering liquid precursors to semi-conductor processing apparatus. The liquid precursor delivery system is generally indicated at ( ) and includes a source ( ), an inlet tube ( ), a two-way valve ( ), a pump assembly ( ), an outlet tube ( ), a shut-off valve ( ) and a flash evaporator ( ). The pump assembly ( ) is in the form of a syringe or variable volume pump and is controlled by a combination of a step motor ( ) and a linear encoder ( ). The arrangement is such that unused liquid precursor can be returned to the source.