The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2003
Filed:
Aug. 10, 2000
Marc Spinali, Danville, CA (US);
Nikon Corporation, Tokyo, JP;
Abstract
A catadioptric lens barrel structure for a projection exposure apparatus includes first and second lens barrels, each having an optical axis that is parallel to the other, and a transverse lens barrel connecting the first lens barrel to the second lens barrel. The catadioptric lens barrel structure may be used in semiconductor fabrication by placing a reticle in front of the entrance of the first lens barrels and a wafer in front of the exit of the second lens barrel. The first and second lens barrels comprise a plurality of sub-barrels serially aligned along the corresponding optical axis. There is physical separation between each sub-barrel in the series to isolate each sub-barrel from thermal and vibrational effects propagated by the other sub-barrels in the series. A support structure is provided to support each of the plurality of sub-barrels and is made of a material having a low coefficient of thermal expansion. The support structure comprises a plurality of support platforms.