The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2003
Filed:
Jun. 05, 2001
Applicant:
Inventors:
John Eric Bower, North Plainfield, NJ (US);
Michal E. Gross, Summit, NJ (US);
Sungho Jin, Millington, NJ (US);
Hareesh Mavoori, Piscataway, NJ (US);
Ainissa Ramirez, Hoboken, NJ (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 1/320 ; G02B 2/600 ;
U.S. Cl.
CPC ...
G02B 1/320 ; G02B 2/600 ;
Abstract
A device for use in a micro-electro-mechanical system (MEMS) optical device. The device includes a substrate having opposing first and second sides and a diffusion barrier layer formed over at least the first side. The device further includes a light reflective optical layer formed over the diffusion barrier layer on the first side of the substrate. The second side may desirably have a stress balancing layer located thereover.