The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2003
Filed:
Sep. 20, 2000
Applicant:
Inventors:
Hideki Ina, Yokohama, JP;
Hiroshi Morohoshi, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 1/100 ; G03B 2/742 ; G03B 2/732 ;
U.S. Cl.
CPC ...
G01B 1/100 ; G03B 2/742 ; G03B 2/732 ;
Abstract
A position measuring method and a position measuring system using the same are disclosed. Plural marks of different linewidths are formed at different locations on an object to be measured, and the plural marks are detected, at the different locations and with different focus states. For determination of a measurement mark, such a mark among the plural marks as having a linewidth with which a change in focus characteristic, at the different locations, is smallest, is selected, and then the position measurement is performed to the object by using the determined measurement mark.