The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2003
Filed:
Mar. 24, 2000
Applicant:
Inventors:
Ikuo Nakajima, Tokyo, JP;
Toshiji Nishiguchi, Kawasaki, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 7/24 ;
U.S. Cl.
CPC ...
H01J 7/24 ;
Abstract
A plasma generating apparatus comprises a pair of electrodes consisting of an electrode connected to an AC power source and a grounded electrode. An inorganic dielectric substance containing barium titanate as a principal component is filled between the electrodes. It is possible to generate a stable and uniform glow discharge under the atmospheric pressure at low cost by applying a considerably low voltage between said electrodes.