The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2003
Filed:
Aug. 17, 2000
High q-large tuning range micro-electro mechanical system (mems) varactor for broadband applications
Applicant:
Inventors:
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/7108 ; H01L 2/993 ;
U.S. Cl.
CPC ...
H01L 2/7108 ; H01L 2/993 ;
Abstract
A Micro Electro-Mechanical System (MEMS) varactor ( ) having a bottom electrode ( ) formed over a substrate ( ) and a dielectric material ( ) disposed over the bottom electrode ( ). A pull-down electrode ( ) is formed over spacer ( ) and the dielectric material ( ). The MEMS varactor ( ) is adapted to operate in a stiction mode, with at least a portion of pull-down electrode ( ) in contact with dielectric material ( ). The MEMS varactor ( ) has a high Q, large tuning range, and high sensitivity.