Method of producing vertical interconnects between thin film microelectronic devices and products comprising such vertical interconnects

Abstract

The present invention provides a method of photochemically producing a vertical interconnect between a first and a second thin-film microelectronic device in an vertical interconnect area which comprises an overlap of a stack of a first electrically conducting area, optionally an organic electrically semiconducting area, an organic electrically insulating area comprising adapted photoresist material and a second organic electrically conducting area, wherein the organic electrically insulating area is removed within the overlapping area and substituted by an electrically conducting area which is extended from at least said first or said second electrically conducting area. The method is useful in the manufacture of electronic devices, preferably integrated circuits, consisting substantially of organic materials.