The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2003
Filed:
Nov. 17, 2000
Yoshifumi Akaike, Tokyo, JP;
Sony Corporation, Tokyo, JP;
Abstract
A method for cleaning a polishing tool capable of reliably removing deposited solidified abrasive and impurities and thereby capable of suppressing scratching of a polished object and reducing residual particles on the polished face of the polished object, comprising the steps of arranging with respect to the polishing tool a cleaning member provided with facing surfaces for forming clearances with cleaned surfaces of the polishing tool feeding a cleaning solution to clearances formed between the facing surfaces and the cleaned surfaces to form cleaning solution films, and cleaning the cleaned surfaces by rotating the polishing tool, the cleaning solution being fed to clearances between the cleaned surfaces and the facing surfaces through feed ports formed in the cleaning member and opened in the facing surfaces, and a polishing method and polishing apparatus using the same.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile