The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2003
Filed:
Jan. 30, 2002
Applicant:
Inventors:
Richard E. Martin, Leander, TX (US);
Dean J. Denning, Austin, TX (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/166 ;
U.S. Cl.
CPC ...
H01L 2/166 ;
Abstract
A process for manufacturing semiconductors uses an enclosure ( ) having an interior surface-that is intentionally-roughened by spraying quartz ( ) onto the interior surface. The sprayed quartz ( ) creates additional surface area for the purpose of trapping or capturing etched material in the enclosure during the process. The roughness of the interior surface is not significantly reduced during the semiconductor processing so that only chemical cleaning is required to maintain the interior surface for long-term use.