The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2003
Filed:
Jul. 11, 2001
Brian P. Cluggish, San Diego, CA (US);
Stephen F. Agnew, San Diego, CA (US);
Sergei Putvinski, La Jolla, CA (US);
Archimedes Technology Group, Inc., San Diego, CA (US);
Abstract
A collector for use in removing metal ions from a plasma in a vacuum chamber includes a collector plate that is mounted inside the chamber and formed with an internal cooling channel. An injector introduces a dissociated salt into the chamber with a first throughput value, and it introduces a plasma including metal ions into the chamber with a lower second throughput value. A pump is used to pump a liquid coolant through the cooling channel to maintain the collector plate at a temperature that forms a portion of the salt as a protective layer on the collector plate, and causes the salt to thereafter deposit on the layer in a molten condition at a faster rate than evaporation therefrom to trap metal ions therein. The trapped metal ions are then removed with the molten salt from the chamber.