The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2003
Filed:
Jun. 02, 2000
Applicant:
Inventor:
Richard F. Buckley, Shrewsbury, MA (US);
Assignee:
Saint-Gobain Ceramics & Plastics, Inc., Worcester, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/122 ; F27D 5/00 ;
U.S. Cl.
CPC ...
H01L 2/122 ; F27D 5/00 ;
Abstract
A silicon carbide cantilever paddle for use in semiconductor wafer processing is disclosed. The cantilever paddle is characterized in that it exhibits acceptable deflection characteristics over the entire range of weight loads with which it may be used, and that it is compatible with existing clamp systems. This is achieved by providing a “two-stage” handle having a large diameter section and a small diameter section, the sections being separated by a handle transition zone.