The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2003
Filed:
Dec. 21, 2000
Applicant:
Inventors:
Heikki Seppä, Helsinki, FI;
Aarne Oja, Espoo, FI;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 4/014 ;
U.S. Cl.
CPC ...
H01J 4/014 ;
Abstract
The invention relates to a method for controlling by electrical means the interelectrode distance of such a micromechanical electrode structure [( )] in which at least one electrode [( )] is attached elastically suspended on the surrounding structure, whereby the elastic properties of each electrode and the electrical control applied over the electrodes determine the interelectrode distance. According to the invention, the distance between the electrodes [( )] is controlled by controlling the AC control current passing via the electrodes [( )].