The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2003
Filed:
Nov. 08, 1999
Linda L. Zhong, Fremont, CA (US);
Connie C. Liu, San Jose, CA (US);
Roger Rostron Wills, Corona, CA (US);
Jeff A. Railton, Placentia, CA (US);
Shawn A. Mawla, San Jose, CA (US);
Jeff D. St. John, Los Gatos, CA (US);
Seagate Technology LLC, Scotts Valley, CA (US);
Abstract
Surface processing of metal, such as CMP, is enhanced and defects reduced by pretreatment to remove a surface layer exhibiting properties different from the bulk metal, such as a baked on oxide layer. Embodiments of the present invention include acid soaking a non-magnetic substrate having an Al, Ni or Ni—P surface with a baked oxide film thereon, thereby removing the oxide film and rendering the reduced surface amenable to CMP with reduced defects, reduced surface roughness and increased production throughput.