The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2003
Filed:
Mar. 16, 2000
Benjamin W. Mooring, Austin, TX (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
Dynamic alignment of a wafer with a blade that carries the wafer involves determination of an approximate value of wafer offset with respect to a desired location of the wafer in a module. This determination is made using an optimization program. The wafer is picked up from a first location using an end effector that transfers the picked up wafer from the first location past sensors to produce sensor data. For an unknown wafer offset, the picked up wafer is misaligned with respect to a desired position of the picked up wafer on the end effector. When the desired position does not correspond to original target coordinates to which the end effector normally moves, the original target coordinates are modified to compensate for the approximate value of the offset and the picked up wafer is placed at the modified target coordinates to compensate for the unknown offset and the misalignment.