The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2003
Filed:
Mar. 14, 2000
Makoto Tamaki, Nara, JP;
Sharp Kabushiki Kaisha, Osaka, JP;
Abstract
A management system for semiconductor fabrication devices is provided with a sensor for always collecting management information from a fabrication device provided in a semiconductor fabrication process line, and a determiner for monitoring the management information collected by the sensor as a time-sequential measured value pattern, and for comparing the measured value pattern with a set value pattern registered beforehand in accordance with the management information. This enables to presume causes or the like of failures based on data, and hence, to immediately identify the causes of even sudden failures, thereby allowing measures to be immediately taken. Consequently, the process line can be stably operated.