The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2003
Filed:
Mar. 07, 2000
Applicant:
Inventor:
George Yefchak, Sant Clara, CA (US);
Assignee:
Agilent Technologies, Inc., Palo Alto, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K 5/00 ;
U.S. Cl.
CPC ...
G21K 5/00 ;
Abstract
Method and apparatus for rapid monitoring of pressure in a chamber equipped with a mass spectrometer by using the primary beam current in conjunction with a conventional pressure gauge. The conventional gauge allows frequent calibration of the relationship of the beam current to the chamber pressure, preventing excessive drift in the system. An advantage of the system is that it takes advantage of instruments already present in a typical spectrometry apparatus.