The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2003
Filed:
Oct. 12, 2000
Benoit Froment, Crolles, FR;
Phillipe Gayet, Saint Vincent de Mercure, FR;
Erik Van Der Vegt, Grenoble, FR;
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Abstract
At least one layer of a dielectric material is deposited on a copper track covered with an encapsulation layer . A cavity is etched in the layer of dielectric material at the location of the future vertical connection. At least one protective layer is deposited in said cavity to preclude diffusion of copper . The protective layer at the bottom of the cavity is subjected to an anisotropic etching treatment and also the encapsulation layer is subjected to etching, whereafter the cavity is filled with copper. The copper particles pulverized during etching the encapsulation layer do not contaminate the dielectric material