The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2003
Filed:
Mar. 20, 2000
Komatsu Ltd., Tokyo, JP;
Abstract
Object of the present invention is to provide uniform heat distribution to a substrate undergoing heat treatment on top of a heat exchange plate. A heat exchange plate is a flat, circular receptacle, has a cooling liquid inflow opening on one end and outflow opening on the other end, and cooling liquid flows on the inside. The surface of the plate is divided, for example, into four zones having different heat capacities and heat transfer characteristics, and an independently controllable foil heater A, A, A, A is attached to each zone. Heater A covers a zone, which circumferentially surrounds a substrate placed on top of a plate, heater A covers a zone directly beneath a substrate, heater A covers a zone of the vicinity of the outflow opening , and heater A covers a zone of the vicinity of the inflow opening . Temperature sensors are disposed on the inside of a plate at four locations of a second zone, which are apt to receive the affects of the first to fourth zones. Based on each plate temperature detected by the temperature sensors to , a temperature of the substrate at a location corresponding thereto is estimated.