The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2003
Filed:
Sep. 13, 2000
Applicant:
Inventors:
Scott G. Adams, Ithaca, NY (US);
James Groves, Endicott, NY (US);
Donato Cardarelli, Medfield, MA (US);
Raymond Carroll, Boxford, MA (US);
Charles R. Dauwalter, Newton Highlands, MA (US);
Assignee:
MilliSensor Systems and Actuators, Inc., West Newton, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01C 1/902 ;
U.S. Cl.
CPC ...
G01C 1/902 ;
Abstract
An oscillatory gyroscope is described with decoupled drive and sense oscillators and reduced cross-axis sensitivity. The gyroscope is fabricated using a plasma micromachining process on standard silicon wafers. The electrical isolation of the drive and sense functions of the gyroscope, contained within the same micromechanical element, reduce cross-coupling while obtaining high inertial mass and high sensitivity.