The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2003
Filed:
Jan. 23, 2001
Applicant:
Inventors:
Shigekazu Kato, Kudamatsu, JP;
Kouji Nishihata, Fokuyama, JP;
Tsunehiko Tsubone, Hikari, JP;
Atsushi Itou, Kudamatsu, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F26B 1/330 ;
U.S. Cl.
CPC ...
F26B 1/330 ;
Abstract
A vacuum processing apparatus which includes a means for transferring substrates from a loader with a transferring device to a double lock chamber and then to a selected vacuum processing chamber. The substrates are then returned to a substrate by the vacuum loader and back into the substrate table. The surfaces of the substrates are maintained in a horizontal position during processing.
Kato, Shigekazu. (2003). Vacuum processing apparatus (U.S. Patent No. 6625899). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6625899
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile