The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 23, 2003

Filed:

Mar. 03, 2000
Applicant:
Inventors:

Sei Moriyasu, Tokyo, JP;

Junichi Kato, Wako, JP;

Yutaka Yamagata, Wako, JP;

Hitoshi Ohmori, Wako, JP;

Shinya Morita, Tokyo, JP;

Assignee:

Riken, , JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/07 ;
U.S. Cl.
CPC ...
G01B 9/07 ;
Abstract

An aspherical reference surface is manufactured with such a shape accuracy that an interference band appears according to the aspherical shape of a surface to be measured, an aspherical wave front is formed using the reference surface, and a large aspherical surface is measured from interference within a short time. The aspherical reference surface is an aspherical surface optical element manufactured by fly-cutting or ELID-grinding, that produces the interference band from light reflected from the aspherical surface and predetermined reference light, and thereby measures the shape of the aspherical surface from interference. The aspherical surface optical element should be an aspherical reflecting mirror with such a shape accuracy that an interference band is generated and parallel light is reflected in the direction normal to the surface to be measured. Thus, the shape can be measured in a short time without using an aspherical surface standard.


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