The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2003
Filed:
Sep. 24, 2001
Horst Schmidt-Boecking, Kelkheim, DE;
Lutz Spielberger, Frankfurt, DE;
Angela Braeuning-Demian, Kriftel, DE;
Maria Cristina Penache, Frankfurt, DE;
Sven Schoessler, Frankfurt, DE;
Till Jahnke, Frankfurt, DE;
Oliver Hohn, Gruendau, DE;
Volker Mergel, Wiesbaden, DE;
Roentdek Handels GmbH, Kelkheim, DE;
Abstract
The invention relates to a particle source, particularly an ion source for the production of excited particles in gaseous media. A dielectric, e.g., Kapton foil, is coated electrically conductively on both sides, and a voltage, preferably pulsed, is applied between the two coatings. A gas discharge is ignited in the gas through-flow by the voltage. Due to a pressure difference between the two sides of the foil, the gas expands from the high pressure side to the low pressure side, preferably in an ultrasonic expansion, whereby a directed, cold beam of excited particles or ions is produced.